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C/SiNx bilayer

Based on

2 Articles
2017 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role layer
2

carbon

Type Single Compound
Formula C
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
critical normal displacement

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Applications

Area Application Nanomaterial Variant Source
coatings

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Characterization

Method Nanomaterial Variant Source
high-resolution transmission electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon nitride
  1. tmLwaovebxUtTsYZMQ
Product

C/SiNx bilayer

Thickness: 7.0 - 7.4 nm

Thickness: ~ 3 nm

Thickness: ~ 4 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • silicon nitride
  1. R6RC7yTwmC1h8UJRUG
Product

C/SiNx bilayer

Thickness: 7.3 - 7.7 nm

Thickness: ~ 3 nm

Thickness: ~ 4 nm

Medium/Support: none

Method 3

Type: Physical formation
Source:
Starting materials
  • silicon-rich silicon nitride
  1. 8pjUxwYdg1Hi1jDiH
Product

C/SiNx bilayer

Thickness: ~ 3 nm

Thickness: ~ 4 nm

Medium/Support: none

Method 4

Type: Physical formation
Source:
Starting materials
  • aluminium oxide/titanium carbide
Product

C/SiNx bilayer

RMS roughness: 5.6 - 6.0 nm

Thickness: 16.5 - 17.5 nm

Thickness: ~ 3 nm

Medium: none

Support: aluminium oxide/titanium carbide

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • silicon nitride
  1. LTuHs6lHRLUV58XKm5
Product

C/SiNx bilayer

Thickness: 7.6 - 8.0 nm

Thickness: ~ 3 nm

Thickness: ~ 5 nm

Medium/Support: none

References

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