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chromium- and gold-coated silicon nitride film on silicon

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon-rich nitride

silicon mononitride silicon nitride
Type Single Compound
Formula SiN
Role partial layer
2

chromium

Type Single Compound
Formula Cr
Role layer
3

gold

Type Single Compound
Formula Au
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
Knudsen number dependent on surrounding gas pressure

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Applications

Area Application Nanomaterial Variant Source
analysis methods

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Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon nitride on silicon
Product

chromium- and gold-coated silicon nitride film on silicon

Thickness: 3 nm

Thickness: 300 nm

Thickness: 60 - 66 nm

Medium: none

Support: silicon

Method 2

Type: Physical formation
Source:
Starting materials
  • silicon nitride on silicon
Product

chromium- and gold-coated silicon nitride film on silicon

Thickness: 3 nm

Thickness: 300 nm

Thickness: 60 - 66 nm

Medium: none

Support: silicon

Method 3

Type: Physical formation
Source:
Starting materials
  • silicon nitride on silicon
Product

chromium- and gold-coated silicon nitride film on silicon

Thickness: 100 - 110 nm

Thickness: 3 nm

Thickness: 500 nm

Medium: none

Support: silicon

Method 4

Type: Physical formation
Source:
Starting materials
Product

chromium- and gold-coated silicon nitride film on silicon

Thickness: 100 nm

Thickness: 20 - 22 nm

Thickness: 3 nm

Medium: none

Support: silicon

Method 5

Type: Physical formation
Source:
Starting materials
  • silicon nitride on silicon
Product

chromium- and gold-coated silicon nitride film on silicon

Thickness: 3 nm

Thickness: 300 nm

Thickness: 60 - 66 nm

Medium: none

Support: silicon

References

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