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silicon-rich SiN membrane

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role raw materials

Properties

General physical and chemical properties

Property Value Source
intrinsic quality factor

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Applications

Area Application Source
tools/devices

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Characterization

Method Source
X-ray photoelectron spectroscopy

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Biological effects

Preparation

References

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