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silicon-rich SiN membrane

Based on

3 Articles
2017 Most recent source

Composition

1

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
e-beam-induced temperature increase

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Applications

Area Application Nanomaterial Variant Source
tools/devices

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Characterization

Method Nanomaterial Variant Source
X-ray photoelectron spectroscopy

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Biological effects

Preparation

References

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