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Pt/Ta2O5/HfO2/TiN on SiO2-coated Si

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

titanium nitride

nc-TiN
Type Single Compound
Formula TiN
Role layer
2

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role layer
3

tantalum pentoxide

tantalum(V) oxide tantalum oxide
Type Single Compound
Formula Ta2O5
Role layer
4

platinum

Type Single Compound
Formula Pt
Role layer

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Product

Pt/Ta2O5/HfO2/TiN on SiO2-coated Si

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • Si wafer
  • titanium nitride
Product

Pt/Ta2O5/HfO2/TiN on SiO2-coated Si

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • Si wafer
  • titanium nitride
Product

Pt/Ta2O5/HfO2/TiN on SiO2-coated Si

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • titanium nitride
  1. eRf6oBhX6TUsq6s941KOm
Product

Pt/Ta2O5/HfO2/TiN on SiO2-coated Si

References

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