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Ta2O5/HfO2/TiN

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

titanium nitride

nc-TiN
Type Single Compound
Formula TiN
Role layer
2

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role layer
3

tantalum pentoxide

tantalum(V) oxide tantalum oxide
Type Single Compound
Formula Ta2O5
Role layer

Properties

Applications

Characterization

Method Source
X-ray photoelectron spectroscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • titanium nitride
  1. GSSYK3uyHnPRNq8lIYuXN
Product

Ta2O5/HfO2/TiN

References

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