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AlOx-capped Ta|Cu|Co trilayer

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

tantalum

Type Single Compound
Formula Ta
Role layer
2

copper

Type Single Compound
Formula Cu
Role layer
3

cobalt

Type Single Compound
Formula Co
Role layer
4

substoichiometric aluminum oxide

noncrystalline aluminum oxide anodized aluminum oxide aluminium suboxide oxidized aluminium aluminium oxide aluminum oxide alumina
Type Single Compound
Formula AlO(x)
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
electrical resistivity

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Applications

Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • SiO2/Si
  • tantalum
Product

AlOx-capped Ta|Cu|Co trilayer

Thickness: 2 nm

Thickness: 2.5 nm

Thickness: 4 nm

Thickness: 6 nm

Medium: none

Support: SiO2/Si

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • SiO2/Si
  • tantalum
Product

AlOx-capped Ta|Cu|Co trilayer

Thickness: 1 nm

Thickness: 2 nm

Thickness: 2.5 nm

Thickness: 6 nm

Medium: none

Support: SiO2/Si

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • SiO2/Si
  • tantalum
Product

AlOx-capped Ta|Cu|Co trilayer

Thickness: 2 nm

Thickness: 2.5 nm

Thickness: 6 nm

Medium: none

Support: SiO2/Si

References

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