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CFx layer on Si substrate

Based on

1 Articles
2016 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

3D structured Si fin array

Si fin array nanostructure Si fin array structure Si fin array
Type Nano Material
Formula
Role partial layer
2

fluorinated carbon

graphite fluoride carbon fluoride fluorocarbon CFx
Type Single Compound
Formula CF(x)
Role partial layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
water contact angle

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Applications

Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
Product

CFx layer on Si substrate

Thickness: ~ 28 nm

Medium: none

Support: silicon

Method 2

Type: Chemical synthesis
Source:
Starting materials
Product

CFx layer on Si substrate

Thickness: ~ 90 nm

Medium: none

Support: silicon

Method 3

Type: Chemical synthesis
Source:
Starting materials
Product

CFx layer on Si substrate

RMS roughness: 0.28 nm

Thickness: 1.3 - 1.7 nm

Medium: none

Support: silicon

References

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