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HfOx film

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

hafnium sub-oxide

hafnium suboxide hafnium oxide hafnia HfOx
Type Single Compound
Formula HfO(x)
Role layer
2

hydroxyl group

hydroxy group hydroxyl hydroxy
Type Single Compound
Formula -OH
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
areal capacitance

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Applications

Area Application Nanomaterial Variant Source
insulation

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • hafnium isopropoxide isopropanol
  • water
  • ethylene glycol monomethyl ether
Product

HfOx film

Thickness: ~ 12 nm

Medium: none

Support: n-doped silicon

References

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