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silicon nitride film patterned with hole array

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon-rich nitride

silicon mononitride silicon nitride
Type Single Compound
Formula SiN
Role raw materials

Properties

General physical and chemical properties

Property Value Source
average group velocity

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Applications

Area Application Source
acoustics

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Characterization

Method Source
scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon-rich nitride
  1. xAQk4KFRYu1Aaj4plluLX7puN87zW
Product

silicon nitride film patterned with hole array

References

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