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silicon nitride film patterned with hole array

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon-rich nitride

silicon mononitride silicon nitride
Type Single Compound
Formula SiN
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
average group velocity

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Applications

Area Application Nanomaterial Variant Source
acoustics

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Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon-rich nitride
  1. Xcp4feSqwKCPwRrkgEXbmDMrujR7S
Product

silicon nitride film patterned with hole array

Hole diameter: 916 nm

Hole periodicity: 970 nm

Thickness: 485 nm

Width of narrowest region between holes: 54 nm

Medium/Support: none

References

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