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patterned poly(styrene)/patterned cured hydrogen silsesquioxane/cross-linked poly(styrene-r-epoxydicyclopentadiene methacrylate)/silicon-containing anti-reflective coating/organic transfer layer HM 8500

Based on

1 Articles
2014 Most recent source

Composition

1

organic transfer layer HM 8500

Type Complex Compound
Formula
Role layer
2

silicon-containing anti-reflective coating

SHB-A940
Type Complex Compound
Formula
Role layer
3

cross-linked poly(styrene-r-epoxydicyclopentadiene methacrylate)

Type Polymer
Formula
Role layer
4

cured hydrogen silsesquioxane

cured HSQ
Type Polymer
Formula
Role partial layer
5

polystyrene

PS
Type Polymer
Formula
Role partial layer

Properties

Applications

Characterization

Method Source
field emission scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
  1. beFWuABpMcJkV6CkyAnyxYIMQG7RgDc9gKdRDGBOaiCutW
Product

patterned poly(styrene)/patterned cured hydrogen silsesquioxane/cross-linked poly(styrene-r-epoxydicyclopentadiene methacrylate)/silicon-containing anti-reflective coating/organic transfer layer HM 8500

Method 2

Type: Chemical synthesis
Source:
  1. NktgvItcOQkwkVJ44uYrxzpAJyCQfSkNkkVSRS13GZvai5
Product

patterned poly(styrene)/patterned cured hydrogen silsesquioxane/cross-linked poly(styrene-r-epoxydicyclopentadiene methacrylate)/silicon-containing anti-reflective coating/organic transfer layer HM 8500

Method 3

Type: Chemical synthesis
Source:
  1. PIhDvHxr6whkkjNwogbfACTvurSGhpkMf7P3Av2XEYLu5j
Product

patterned poly(styrene)/patterned cured hydrogen silsesquioxane/cross-linked poly(styrene-r-epoxydicyclopentadiene methacrylate)/silicon-containing anti-reflective coating/organic transfer layer HM 8500

References

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