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self-assembled poly(styrene-block-methyl methacrylate)/patterned cured hydrogen silsesquioxane/cross-linked poly(styrene-r-epoxydicyclopentadiene methacrylate)/silicon-containing anti-reflective coating/organic transfer layer HM 8500

Based on

1 Articles
2014 Most recent source

Composition

1

organic transfer layer HM 8500

Type Complex Compound
Formula
Role layer
2

silicon-containing anti-reflective coating

SHB-A940
Type Complex Compound
Formula
Role layer
3

cross-linked poly(styrene-r-epoxydicyclopentadiene methacrylate)

Type Polymer
Formula
Role layer
4

cured hydrogen silsesquioxane

cured HSQ
Type Polymer
Formula
Role partial layer
5

poly(styrene-block-methyl methacrylate)

PS-b-PMMA
Type Polymer
Formula
Role layer

Properties

Applications

Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
  1. o84l3Yb5SJq8brQZmIjQ8OEpMVA2VasIa4kon8MbrmKbUb
Product

self-assembled poly(styrene-block-methyl methacrylate)/patterned cured hydrogen silsesquioxane/cross-linked poly(styrene-r-epoxydicyclopentadiene methacrylate)/silicon-containing anti-reflective coating/organic transfer layer HM 8500

Method 2

Type: Chemical synthesis
Source:
  1. IrXKDHWrryEjXZSPtTWra6NkzjXHRLeE0g7xKpMdaxaRNJ
Product

self-assembled poly(styrene-block-methyl methacrylate)/patterned cured hydrogen silsesquioxane/cross-linked poly(styrene-r-epoxydicyclopentadiene methacrylate)/silicon-containing anti-reflective coating/organic transfer layer HM 8500

Method 3

Type: Chemical synthesis
Source:
  1. 1Q5QgCaotvpPGKajK4lcuPlDROBcW6zBr14gfYNziE10Pf
Product

self-assembled poly(styrene-block-methyl methacrylate)/patterned cured hydrogen silsesquioxane/cross-linked poly(styrene-r-epoxydicyclopentadiene methacrylate)/silicon-containing anti-reflective coating/organic transfer layer HM 8500

Method 4

Type: Chemical synthesis
Source:
  1. WqhqVi31icbvpG8xEdyLVxMORdjlCKmwTHSOQqEoTsXciH
Product

self-assembled poly(styrene-block-methyl methacrylate)/patterned cured hydrogen silsesquioxane/cross-linked poly(styrene-r-epoxydicyclopentadiene methacrylate)/silicon-containing anti-reflective coating/organic transfer layer HM 8500

Method 5

Type: Chemical synthesis
Source:
  1. nI8nDSRefdLUSD3HM4JQYybuhVlkhwrRfNQ2QQjo7fGVzd
Product

self-assembled poly(styrene-block-methyl methacrylate)/patterned cured hydrogen silsesquioxane/cross-linked poly(styrene-r-epoxydicyclopentadiene methacrylate)/silicon-containing anti-reflective coating/organic transfer layer HM 8500

References

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