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SU-8/Al2O3/Pt structure

Based on

1 Articles
2016 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

SU-8 epoxy resin

SU-8 precursor SU-8 monomer SU-8
Type Single Compound
Formula C87H96O16
Role raw materials
2

aluminium oxide

aluminum oxide alumina
Type Single Compound
Formula Al2O3
Role layer
3

platinum

Type Single Compound
Formula Pt
Role layer

Properties

General physical and chemical properties

Property Value Source
electrical resistivity

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Applications

Characterization

Method Source
differential scanning calorimetry

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  • water
  • SU-8
  1. HkzyW
Product

SU-8/Al2O3/Pt structure

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • SU-8
Product

SU-8/Al2O3/Pt structure

References

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