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nitrogen-rich tantalum nitride thin film

Based on

1 Articles
2016 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

nitrogen-rich tantalum nitride

Type Complex Compound
Formula
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
electric current

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Applications

Area Application Nanomaterial Variant Source
data storage

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Characterization

Method Nanomaterial Variant Source
transmission electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • tert-butylimido-bis(diethylamido)cyclopentadienyl)tantalum
  • nitrogen
  1. 2uTa7U7o
  2. 7YX0F
Product

nitrogen-rich tantalum nitride thin film

Thickness: 36 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • tert-butylimido-bis(diethylamido)cyclopentadienyl)tantalum
  • nitrogen
  1. dSnVPdWL
  2. UWcnP
Product

nitrogen-rich tantalum nitride thin film

Thickness: 41 nm

Medium/Support: none

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • tert-butylimido-bis(diethylamido)cyclopentadienyl)tantalum
  • nitrogen
  1. SMFYLiRc
  2. TZItk
Product

nitrogen-rich tantalum nitride thin film

Thickness: 18 nm

Medium/Support: none

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • tert-butylimido-bis(diethylamido)cyclopentadienyl)tantalum
  • nitrogen
  1. 8619774a
  2. 0kf9L
Product

nitrogen-rich tantalum nitride thin film

Thickness: 10 nm

Medium/Support: none

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • tert-butylimido-bis(diethylamido)cyclopentadienyl)tantalum
  • nitrogen
  1. tZ9TToB6
  2. 8x6KQ
Product

nitrogen-rich tantalum nitride thin film

Thickness: 5 nm

Medium/Support: none

References

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