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IGZO/zirconium-incorporated AlOx film

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

zirconium-incorporated AlOx film

ZAO film
Type Nano Material
Formula
Role layer
2

IGZO

Type Complex Compound
Formula
Role layer

Properties

Applications

Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • gallium(III) nitrate hydrate
  • zinc acetate dihydrate
  • indium(III) nitrate hydrate
  1. p9PtGY8oQ2R9bpp1P
  2. bdWp
  3. tjn66yJW
  4. RgQk
Product

IGZO/zirconium-incorporated AlOx film

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • gallium(III) nitrate hydrate
  • zinc acetate dihydrate
  • indium(III) nitrate hydrate
  1. BgmnV2aDqF5xAGTts
  2. WHm6
  3. srMvNYSx
  4. Ic2S
Product

IGZO/zirconium-incorporated AlOx film

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • gallium(III) nitrate hydrate
  • zinc acetate dihydrate
  • indium(III) nitrate hydrate
  1. 85KHjwnhzTGjRIrRA
  2. FE7I
  3. VOJLCPt4
  4. inXQ
Product

IGZO/zirconium-incorporated AlOx film

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • gallium(III) nitrate hydrate
  • zinc acetate dihydrate
  • indium(III) nitrate hydrate
  1. bcbxeXrj7KRBXcJ0T
  2. nzuj
  3. TRZHj1UC
  4. QK3Z
Product

IGZO/zirconium-incorporated AlOx film

References

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