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IGZO/zirconium-incorporated AlOx film

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

zirconium-incorporated AlOx film

ZAO film
Type Nano Material
Formula
Role layer
2

IGZO

Type Complex Compound
Formula
Role layer

Properties

Applications

Characterization

Method Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • gallium(III) nitrate hydrate
  • zinc acetate dihydrate
  • indium(III) nitrate hydrate
  1. cvdeErgzDCBN6Agqn
  2. 8yb2
  3. 62BEO0PT
  4. VKtZ
Product

IGZO/zirconium-incorporated AlOx film

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • gallium(III) nitrate hydrate
  • zinc acetate dihydrate
  • indium(III) nitrate hydrate
  1. Pl75tyTcllNHerI2V
  2. ivX9
  3. Kp66f8Ln
  4. cj5a
Product

IGZO/zirconium-incorporated AlOx film

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • gallium(III) nitrate hydrate
  • zinc acetate dihydrate
  • indium(III) nitrate hydrate
  1. X4qB0tsgkJrTETPdl
  2. BN4y
  3. 6YBfSU6k
  4. g3kd
Product

IGZO/zirconium-incorporated AlOx film

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • gallium(III) nitrate hydrate
  • zinc acetate dihydrate
  • indium(III) nitrate hydrate
  1. p1OOMavLxCla97MdQ
  2. AXPD
  3. ZFuXlYrH
  4. T7Gj
Product

IGZO/zirconium-incorporated AlOx film

References

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