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IGZO/zirconium-incorporated AlOx film

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

zirconium-incorporated AlOx film

ZAO film
Type Nano Material
Formula
Role layer
2

IGZO

Type Complex Compound
Formula
Role layer

Properties

Applications

Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • gallium(III) nitrate hydrate
  • zinc acetate dihydrate
  • indium(III) nitrate hydrate
  1. mMmEXdJG6rKnP1BDy
  2. R8gu
  3. XPWZMjvi
  4. aw5m
Product

IGZO/zirconium-incorporated AlOx film

RMS roughness: 0.159 nm

Thickness: 35 - 37 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • gallium(III) nitrate hydrate
  • zinc acetate dihydrate
  • indium(III) nitrate hydrate
  1. Q03EoE7Wl8QlKF9Gy
  2. LIRV
  3. yK215RWh
  4. kktE
Product

IGZO/zirconium-incorporated AlOx film

RMS roughness: 0.122 nm

Thickness: 35 - 37 nm

Medium/Support: none

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • gallium(III) nitrate hydrate
  • zinc acetate dihydrate
  • indium(III) nitrate hydrate
  1. wOusFOuebHHBP1daW
  2. J4JK
  3. iJcKtGbk
  4. ZBxP
Product

IGZO/zirconium-incorporated AlOx film

RMS roughness: 0.132 nm

Thickness: 35 - 37 nm

Medium/Support: none

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • gallium(III) nitrate hydrate
  • zinc acetate dihydrate
  • indium(III) nitrate hydrate
  1. Ap9qR5bIDctHNBxNc
  2. gAFq
  3. 4cxayYhl
  4. spgI
Product

IGZO/zirconium-incorporated AlOx film

RMS roughness: 0.123 - 0.157 nm

Thickness: 35 - 37 nm

Medium/Support: none

References

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