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Hf0.5Zr0.5O2 film

Based on

1 Articles
2016 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

HfO2-ZrO2 solid solution

HZO
Type Complex Compound
Formula
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
capacitance dependent on electric switching cycle number

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Applications

Area Application Nanomaterial Variant Source
data storage

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Characterization

Method Nanomaterial Variant Source
grazing incidence X-ray and neutron diffraction

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • ethyl(methyl){tris[ethyl(methyl)amino]hafnio}amine
  • TiN/SiO2/Si
  • ozone
See all (4)
Product

Hf0.5Zr0.5O2 film

Thickness: 9 nm

Medium: none

Support: TiN/SiO2/Si

References

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