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silicon/nanopatterned buried oxide

Based on

1 Articles
2014 Most recent source

Composition

1

silicon-rich silicon oxide

SRSO SiOx
Type Single Compound
Formula SiO(x)
Role layer
2

silicon

Type Single Compound
Formula Si
Role layer
3

boron

Type Single Compound
Formula B
Role dopant

Properties

Applications

Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
  1. zwxMh7OqkzBLAX
Product

silicon/nanopatterned buried oxide

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • silicon-rich silicon oxide
Product

silicon/nanopatterned buried oxide

References

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