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Ti/Pt/hole-patterned SiO2/TixOy/Ta/Pt film

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

titanium

Type Single Compound
Formula Ti
Role layer
2

platinum

Type Single Compound
Formula Pt
Role layer
3

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role partial layer
4

titanium oxide

titania TixOy
Type Single Compound
Formula TiO(x)
Role layer
5

tantalum oxide/tantalum

TaO2-x/Ta
Type Complex Compound
Formula
Role layer
6

platinum

Type Single Compound
Formula Pt
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
initial resistance

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Applications

Characterization

Method Nanomaterial Variant Source
X-ray photoelectron spectroscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • titanium
  • Si/SiO2
Product

Ti/Pt/hole-patterned SiO2/TixOy/Ta/Pt film

Hole diameter: 250 nm

Thickness: 14 nm

Thickness: 50 nm

Thickness: 7.5 nm

Medium: none

Support: Si/SiO2

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • titanium
  • Si/SiO2
Product

Ti/Pt/hole-patterned SiO2/TixOy/Ta/Pt film

Hole diameter: 250 nm

Thickness: 14 nm

Thickness: 30 nm

Thickness: 50 nm

Medium: none

Support: Si/SiO2

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • titanium
  • Si/SiO2
Product

Ti/Pt/hole-patterned SiO2/TixOy/Ta/Pt film

Hole diameter: 250 nm

Thickness: 14 nm

Thickness: 50 nm

Thickness: ~ 3.5 nm

Medium: none

Support: Si/SiO2

References

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