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OTS monolayer/SiNx/Si

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon

Type Single Compound
Formula Si
Role carriers
2

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role layer
3

trichloro(octadecyl)-silane

n-octadecyltrichlorosilane trichloro(octadecyl)silane octadecayltrichlorosilane octadecyl trichlorosilane octadecyltrichlorosilane trichlorooctadecylsilane octadecyltrchlorosilane C18-OTS ODTS OTCS OTS
Type Single Compound
Formula C18H37Cl3Si
Role layer

Properties

Applications

Area Application Source
raw materials/precursors/templates

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Characterization

Method Source
mass spectrometry

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
Product

OTS monolayer/SiNx/Si

References

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