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copper seed layer on tantalum/silicon dioxide/silicon trench substrate

Based on

1 Articles
2011 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
2

tantalum

Type Single Compound
Formula Ta
Role layer
3

copper

Type Single Compound
Formula Cu
Role layer

Properties

Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
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  2. e0EEcADNSQ97c8BWCb6j
  3. PJzrNTKTeIXJqUZysKnlWpmQ115aM03bRKXi6RncpJSQKvvsAjP0bSGvVi6jqHKvUhG
  4. aDnAK55yvHa6JoNptjgIbEixROKQ2ptjic1qvoYdyu
  5. 055KP
  6. NqU89ZxVg9IwABiVUWknREUmpjYx9HV6
  7. GOGMMaObrVk9QKjJ9ESsyBOJoRZ7FpREBs4u2bM7a82aZHoFQwVz81UGfIoTn7ObMUWHf2ATfIhTt17LWnWi3LiiiHu2Eutglw7oUFTlASg55bWYzKPeAci7jXwiksjiWKu7cliDXq
Product

copper seed layer on tantalum/silicon dioxide/silicon trench substrate

References

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