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SiCOH film

Based on

1 Articles
2011 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

organosilicate glass

Type Complex Compound
Formula
Role raw materials
2

diamond-like C:H network

hydrocarbon moiety hydrocarbon CxHy CHx
Type Single Compound
Formula CH(x)
Role dopant

Properties

General physical and chemical properties

Property Value Source
extinction coefficient dependent on RF power

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Applications

Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • diamond-like C:H network
  • organosilicate glass
  1. 0ic6hRplYSIgpXdIfAaNskjrHfg7dd3wEDkUpUg7
  2. e10IezVmcLL
Product

SiCOH film

Method 2

Type: Physical formation
Source:
Starting materials
  • diamond-like C:H network
  • organosilicate glass
  1. brQ15lTFYOsoCRuip2cUtGCHBpxOBLcZCUEZoRVN
  2. TYDybsakmLs
Product

SiCOH film

References

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