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Si-based linear-structured templates

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon

Type Single Compound
Formula Si
Role raw materials
2

hydrogen silsesquioxane monomer

hydrogen silsesquioxane octasilsesquioxane XR-1541-002 Fox-16 HSQ
Type Single Compound
Formula H8O12Si8
Role layer

Properties

Applications

Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • Si/Si3N4 double side polished wafer
  1. KfN5OltWVEgD984qFWFv
Product

Si-based linear-structured templates

Height: 930 nm

Height: ~ 140 nm

Thickness: 40 nm

Width: 1000 nm

Medium: none

Support: Si/Si3N4 double side polished wafer

Method 2

Type: Physical formation
Source:
Starting materials
  • Si/Si3N4 double side polished wafer
  1. OzXf6Lf4ViJgkHfyVBnp
Product

Si-based linear-structured templates

Height: 930 nm

Height: ~ 140 nm

Thickness: 10 - 100 nm

Width: 1000 nm

Medium: none

Support: Si/Si3N4 double side polished wafer

Method 3

Type: Physical formation
Source:
Starting materials
  • Si/Si3N4 double side polished wafer
  1. BhAyxZ4WcS7RDPgK4BQZ
Product

Si-based linear-structured templates

Height: 930 nm

Height: ~ 140 nm

Thickness: 40 nm

Width: 1000 nm

Medium: none

Support: Si/Si3N4 double side polished wafer

Method 4

Type: Physical formation
Source:
Starting materials
  • Si/Si3N4 double side polished wafer
  1. vnnpVN3LERSvVskFdGy4
Product

Si-based linear-structured templates

Height: 930 nm

Height: ~ 140 nm

Thickness: 10 - 70 nm

Width: 1000 nm

Medium: none

Support: Si/Si3N4 double side polished wafer

References

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