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nano-slots array patterned photoresist film on silica wafer

Based on

1 Articles
2015 Most recent source

Composition

1

photoresist

Type Complex Compound
Formula
Role layer
2

anisotropic nano-slot arrays patterned chromium film

Type Nano Material
Formula
Role imprint/shape

Properties

Applications

Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • photoresist
  • silica wafer
Product

nano-slots array patterned photoresist film on silica wafer

Slot length: ~ 150 - ~ 180 nm

Slot width: ~ 60 - 80 nm

Thickness: 30 nm

Medium: none

Support: silica wafer

References

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