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after CCVD TaNx thin film

Based on

1 Articles
2011 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

nanofilm

Type Nano Material
Formula
Role layer
2

carbon nanotubes

Type Nano Material
Formula
Role layer

Properties

Applications

Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • ferrocene
  • mixture of substance based on (tantalum(III) nitride/tantalum nitride)
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  2. naBBKZl
  3. VjdybChmHtQSeCzXoLNv
Product

after CCVD TaNx thin film

Size: not specified

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • ferrocene
  • mixture of substance based on (tantalum(III) nitride/tantalum(III) nitride/atomic nitrogen/atomic nitrogen/atomic oxygen/atomic oxygen/β-tantalum/β-tantalum)
  1. KoXvvnzbOeUfhn0OUke4q6CI1OpzmiUpPIhse35
  2. BFanugH
  3. xSPoMU23fowFkH8gKcm9
Product

after CCVD TaNx thin film

Size: not specified

Medium/Support: none

References

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