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suspended nanohole array with silica layer on backside

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
2

silicon nitride

Type Single Compound
Formula Si3N4
Role layer
3

silicon

Type Single Compound
Formula Si
Role layer
4

silicon nitride

Type Single Compound
Formula Si3N4
Role layer
5

silver

Type Single Compound
Formula Ag
Role layer
6

silver

Type Single Compound
Formula Ag
Role layer

Properties

Applications

Area Application Nanomaterial Variant Source
optoelectronics

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Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  1. VhPnXnVK3mxMFUFn
Product

suspended nanohole array with silica layer on backside

Hole diameter: ~ 200 nm

Hole periodicity: ~ 500 nm

Thickness: 120 nm

Thickness: 200 nm

Thickness: 30 nm

Medium/Support: none

References

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