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Al2O3/W/Al2O3 nanolaminate

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

Al2O3 film

Type Nano Material
Formula
Role layer
2

tungsten film

W film
Type Nano Material
Formula
Role layer
3

Al2O3 film

Type Nano Material
Formula
Role layer

Properties

General physical and chemical properties

Property Value Source
electrical conductivity

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Applications

Area Application Source
tools/devices

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Characterization

Method Source
scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  • water
  1. Rffa0FqeznOvxCMdKJyv4EuVBtXYgc0WUm
  2. ulTIz
Product

Al2O3/W/Al2O3 nanolaminate

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  • water
  1. cSeDNemx7mpd5v9a5E1ZoTPVRgwa4lv8IE
  2. i6YMq
Product

Al2O3/W/Al2O3 nanolaminate

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  • water
  1. BylpHUrWp9nLO4kxr5z5f30eXWNwg1G8ZW
  2. ncgVK
Product

Al2O3/W/Al2O3 nanolaminate

References

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