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hafnium zirconium oxide thin film

Based on

3 Articles
2016 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

hafnium zirconium oxide

Type Single Compound
Formula Hf0.4Zr0.6O2
Role raw materials

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • ethyl(methyl){tris[ethyl(methyl)amino]hafnio}amine
  • ozone
  • tetrakis(ethylmethylamido) zirconium
  1. XlMqGxPMUEp6DBj2
Product

hafnium zirconium oxide thin film

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • ethyl(methyl){tris[ethyl(methyl)amino]hafnio}amine
  • ozone
  • tetrakis(ethylmethylamido) zirconium
Product

hafnium zirconium oxide thin film

Method 3

Type: Chemical synthesis
Source:
Starting materials
See all (4)
  1. sEeOip
Product

hafnium zirconium oxide thin film

References

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