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SiNx-coated inverted pyramid-based boron-doped silicon

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

phosphorus-doped silicon

n-Si
Type Complex Compound
Formula
Role layer
2

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role layer

Properties

Applications

Characterization

Method Nanomaterial Variant Source
UV

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • B-doped Si
Product

SiNx-coated inverted pyramid-based boron-doped silicon

Thickness: 80 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • B-doped Si
Product

SiNx-coated inverted pyramid-based boron-doped silicon

Thickness: 80 nm

Medium/Support: none

References

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