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lanthanum strontium manganese oxide-polycrystalline yttria stabilized zirconia film on silicon wafer

Based on

1 Articles
2015 Most recent source

Composition

1

silicon

Type Single Compound
Formula Si
Role raw materials
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
3

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role layer
4

yttria-stabilized zirconia

YSZ
Type Complex Compound
Formula
Role layer
5

lanthanum strontium manganese oxide

LSM
Type Complex Compound
Formula
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
oxygen surface exchange dependent on temperature

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Applications

Area Application Nanomaterial Variant Source
electronics

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Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon dioxide
  • silicon
Product

lanthanum strontium manganese oxide-polycrystalline yttria stabilized zirconia film on silicon wafer

Grain boundaries thickness: ~ 1 nm

Grain size: 9 - 23 nm

RMS roughness: 0.9 nm

Thickness: 100 nm

Thickness: 300 nm

Medium/Support: none

References

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