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after CCVD TaNx thin film

Based on

1 Articles
2011 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

nanofilm

Type Nano Material
Formula
Role layer
2

carbon nanotubes

Type Nano Material
Formula
Role layer

Properties

Applications

Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • ferrocene
  • mixture of substance based on (atomic nitrogen/atomic oxygen/α-tantalum)
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  2. lE97Ck9
  3. lw00GQfj0tJvQlge2ma6
Product

after CCVD TaNx thin film

References

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