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Al2O3 thin film

Based on

88 Articles
3 Patents
2017 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

aluminium oxide

aluminum oxide alumina
Type Single Compound
Formula Al2O3
Role raw materials

Properties

General physical and chemical properties

Property Value Source
density

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refractive index

Applications

Area Application Source
coatings

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electronics

Characterization

Method Source
atomic force microscopy

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ellipsometry
scanning electron microscopy
spectroscopic ellipsometry
transmission electron microscopy
UV
UV-Vis spectroscopy
X-ray diffraction
X-ray reflectometry

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • aluminium(III) sulfate
  • water
  1. dwVFHFvPjaEwybjaxDrqmP6ev2iy4YnaRGf0FzIx
  2. dUqukKXUR5ydJth2dXWSDp
Product

Al2O3 thin film

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • aluminium(III) chloride
  • ozone
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  2. 43lKZfyYyt77gTGnTkgQm7mUkQqga3favHyMry
Product

Al2O3 thin film

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • aluminium oxide
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  2. e35Vn
  3. fj
  4. eVwMjnphYoqFf
  5. mFLwFs
Product

Al2O3 thin film

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  • water
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  2. Gzdzj9Y0X
  3. f4EqhQw
  4. siMdDEQewWfvnEeDp
Product

Al2O3 thin film

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • ozone
  • aluminium(III) chloride
  1. UdnB3
  2. MUQA0q2WUZvKY9zsYMbO7qvtZfiZh7w1pUcbLa
Product

Al2O3 thin film

References

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