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Al2O3 thin film

Based on

144 Articles
9 Patents
2017 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

aluminium oxide

aluminum oxide alumina
Type Single Compound
Formula Al2O3
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
density

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refractive index
relative permittivity

Catalytic properties

Reaction Value Nanomaterial Variant Source
ethylene dehydrogenation

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Applications

Area Application Nanomaterial Variant Source
coatings

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electronics

Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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ellipsometry
scanning electron microscopy
spectroscopic ellipsometry
transmission electron microscopy
UV
UV-Vis spectroscopy
X-ray diffraction
X-ray photoelectron spectroscopy
X-ray reflectometry

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • aluminium
  • oxygen
Product

Al2O3 thin film

Size: not specified

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  • water
  1. O5Jb0iE
  2. gVG99QN5wBNHpBWZM20LgYusTXcpj
Product

Al2O3 thin film

Thickness: ~ 10 nm

Medium/Support: none

Method 3

Type: Physical formation
Source:
Starting materials
  1. OQ8ft7RzYsBImfhq5HnK9HMQscCKUmkyC2bgStLXBUiZhd4MvHXHgPLD
  2. SL2B3cJAHqUCs
Product

Al2O3 thin film

Thickness: ~ 10 nm

Medium/Support: none

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  • water
  1. k10fSBp
Product

Al2O3 thin film

Monolayer number: 1 nm

Medium/Support: none

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  • water
  1. qcAqdC5rR0L1bvLUS99wQZmENlwnWkQ
  2. o1ZNY
  3. WSf6SkkUVmJHyF9JGZtilJZWIJ9Njpbt8
Product

Al2O3 thin film

Thickness: ~ 1 - ~ 160 nm

Medium/Support: none

References

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