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Al2O3 thin film

Based on

150 Articles
9 Patents
2017 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

amorphous aluminium oxide

amorphous aluminum oxide aluminium(III) oxide amorphous alumina aluminium oxide amorphous Al2O3 aluminum oxide alumina a-Al2O3
Type Single Compound
Formula Al2O3
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
density

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refractive index
relative permittivity

Catalytic properties

Reaction Value Nanomaterial Variant Source
ethylene dehydrogenation

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Applications

Area Application Nanomaterial Variant Source
coatings

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electronics

Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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ellipsometry
scanning electron microscopy
spectroscopic ellipsometry
transmission electron microscopy
UV
UV-Vis spectroscopy
X-ray diffraction
X-ray photoelectron spectroscopy
X-ray reflectometry

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  1. iCPCSC
Product

Al2O3 thin film

Thickness: 100 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  1. RxM5gH
Product

Al2O3 thin film

Thickness: 45 nm

Medium/Support: none

Method 3

Type: Physical formation
Source:
Starting materials
  • aluminium oxide
  1. OmValrpYtxFrM1ZlUUEj10XdrWOrw92LKde
Product

Al2O3 thin film

Thickness: ~ 3 nm

Medium/Support: none

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • aluminium
  • oxygen
  1. CPFtOeb79pwWSnGe9
Product

Al2O3 thin film

Thickness: 85 nm

Medium/Support: none

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  1. DjKRe5dxRmZ0kcVoIQsvKPWrMnb22KINR4tq39ViRvRO2MKln5PLkLqkrft1GynuaQDlDuy2BR4DVljA
  2. GuYzc
  3. ao7DA9tP
  4. xvFw4
Product

Al2O3 thin film

Thickness: 75 nm

Medium/Support: none

References

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