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annealed TaNx thin film

Based on

1 Articles
2011 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

mixture of substance based on (tantalum pentoxide/tantalum nitride)

Type Complex Compound
Formula
Role raw materials

Properties

Applications

Characterization

Method Nanomaterial Variant Source
X-ray diffraction

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  1. QhtS2pYRb4
Product

annealed TaNx thin film

Thickness: 40 - 140 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  1. y21BjShJaa
Product

annealed TaNx thin film

Thickness: 40 - 140 nm

Medium/Support: none

References

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