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lithium phosphorus oxynitride thin film/trench patterned silicon

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon

Type Single Compound
Formula Si
Role carriers
2

lithium phosphorus oxynitride

LiPON
Type Single Compound
Formula Li0.90PO2.75N0.55
Role layer

Properties

Applications

Area Application Source
energy storage

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Characterization

Method Source
scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • diethyl phosphoramidate
  • lithium hexamethyldisilazide
  1. 6O00Tl
  2. 1H3vEWFVCGBz3NaODF3p2dfxEDhE43C45MXIDQ02
Product

lithium phosphorus oxynitride thin film/trench patterned silicon

References

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