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nanopores in graphene nanosheet suspended over nanoapertures on HfO2-passivated SiNx window in SiO2/Si support

Based on

1 Articles
2015 Most recent source

Composition

1

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
2

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role layer
3

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role layer
4

two/three-layer AB Bernal graphene with nanopores

few-layer graphene flakes with nanopores graphene with nanopores
Type Nano Material
Formula
Role partial layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
conductance

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Applications

Area Application Nanomaterial Variant Source
diagnostics

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Characterization

Method Nanomaterial Variant Source
transmission electron microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
  1. LZVQc3BqrzloMEmF7kr3zQPOQ1x6Bjwn
  2. d8rqlUXufG3qXB0yt1ykvhj6JWG8
  3. e12rSk
Product

nanopores in graphene nanosheet suspended over nanoapertures on HfO2-passivated SiNx window in SiO2/Si support

Central hole diameter: 800 nm

Pore diameter: ~ 6.2 - ~ 6.8 nm

Side hole diameter: 450 nm

Thickness: 10 nm

Thickness: 100 nm

Thickness: 2500 nm

Window size: ~ 40000 - ~ 80000 nm

Medium: none

Support: silicon

Method 2

Type: Physical formation
Source:
  1. 6SZmLWvimSEGrLTHZndrQDoTo3YWamJk
  2. rp83Gim2FOVZApetQexSivZTRDHJ
  3. vmmrvY
Product

nanopores in graphene nanosheet suspended over nanoapertures on HfO2-passivated SiNx window in SiO2/Si support

Central hole diameter: 800 nm

Pore diameter: ~ 3.9 - ~ 4.5 nm

Side hole diameter: 450 nm

Thickness: 10 nm

Thickness: 100 nm

Thickness: 2500 nm

Window size: ~ 40000 - ~ 80000 nm

Medium: none

Support: silicon

Method 3

Type: Physical formation
Source:
  1. c3iDPyQnbYsCIwDjeUPpv5LQ18Vlfrbf
  2. ZwLfdPY2Yo2QhLlBeD2QE2wk0onO
  3. vZaMoI
Product

nanopores in graphene nanosheet suspended over nanoapertures on HfO2-passivated SiNx window in SiO2/Si support

Central hole diameter: 800 nm

Pore diameter: ~ 7.5 nm

Side hole diameter: 450 nm

Thickness: 10 nm

Thickness: 100 nm

Thickness: 2500 nm

Window size: ~ 40000 - ~ 80000 nm

Medium: none

Support: silicon

Method 4

Type: Physical formation
Source:
  1. 0nsGWz4rpmNSW9PDU6q3ymiRLSBncbmB
  2. 9WTsyCMAkv5vv1gohfW4pL6lVprY
  3. 8ZNJ5K
Product

nanopores in graphene nanosheet suspended over nanoapertures on HfO2-passivated SiNx window in SiO2/Si support

Central hole diameter: 800 nm

Pore diameter: ~ 5 - ~ 6 nm

Side hole diameter: 450 nm

Thickness: 10 nm

Thickness: 100 nm

Thickness: 2500 nm

Window size: ~ 40000 - ~ 80000 nm

Medium: none

Support: silicon

Method 5

Type: Physical formation
Source:
  1. LMX2Kl2ZnXpBNs5fjYi7IYUfMmGKRWTT
  2. oLcOqkLjR9sfqDaGB1JBmwjBT2u7
  3. i4TG5k
Product

nanopores in graphene nanosheet suspended over nanoapertures on HfO2-passivated SiNx window in SiO2/Si support

Central hole diameter: 800 nm

Pore diameter: ~ 2.8 - ~ 3.9 nm

Side hole diameter: 450 nm

Thickness: 10 nm

Thickness: 100 nm

Thickness: 2500 nm

Window size: ~ 40000 - ~ 80000 nm

Medium: none

Support: silicon

References

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