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SiNx/SiO2

Based on

3 Articles
2017 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
2

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
reflectivity

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Applications

Area Application Nanomaterial Variant Source
diagnostics

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Characterization

Method Nanomaterial Variant Source
infrared spectroscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon dioxide
  • silicon-rich silicon nitride
  • sapphire
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  2. aSod92HYcM9UX668Mk90HSZ0OT2byVhM
  3. zPZ7R07vXkIsa2gDfb4g6jdLo2aaR
Product

SiNx/SiO2

Thickness: 48.7 nm

Thickness: 60.9 nm

Medium: none

Support: sapphire

Method 2

Type: Physical formation
Source:
Starting materials
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Product

SiNx/SiO2

Central hole diameter: 800 nm

Side hole diameter: 450 nm

Thickness: 100 nm

Thickness: 2500 nm

Window size: ~ 40000 - ~ 80000 nm

Medium: none

Support: silicon

References

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