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silicon nitride film on SiO2/Si

Based on

2 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
2

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role layer

Properties

General physical and chemical properties

Property Value Source
reflectivity

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Applications

Area Application Source
diagnostics

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Characterization

Method Source
optical microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon dioxide
  • silicon-rich silicon nitride
  • sapphire
  1. qj5jIJcICszMk1QUco1x
  2. 8NCSTs80REbWQ1VU2ZI6NRSFVaJtUqfE
  3. K5E8OvcMwxExt7rKp6PmROQ5GwD4Y
Product

silicon nitride film on SiO2/Si

Method 2

Type: Physical formation
Source:
Starting materials
  1. FCKfIQjLOQp
Product

silicon nitride film on SiO2/Si

References

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