Fast insight into nanotechnology

Access easily searchable nanoscience data, synthesis methods and literature

BOX/Si/SiN/patterned OPL/SiN

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

buried oxide

BOX
Type Complex Compound
Formula
Role layer
2

silicon

Type Single Compound
Formula Si
Role layer
3

silicon-rich nitride

silicon mononitride silicon nitride
Type Single Compound
Formula SiN
Role layer
4

patterned OPL/SiN

Type Nano Material
Formula
Role layer

Properties

Applications

Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  1. zrK0ODAXUGh5eJ
Product

BOX/Si/SiN/patterned OPL/SiN

Method 2

Type: Chemical synthesis
Source:
Starting materials
  1. USYkhhU1SZe4KS
Product

BOX/Si/SiN/patterned OPL/SiN

References

Full content is available to subscribers only

To view content please choose from the following:

We use cookies to improve your experience with our site. More information

Sign up for a free trial