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HSQ-coated SiNx membrane

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role layer
2

hydrogen silsesquioxane monomer

hydrogen silsesquioxane octasilsesquioxane XR-1541-002 XR-1541-4 XR-1541 Fox-16 HSQ
Type Single Compound
Formula H8O12Si8
Role layer

Properties

General physical and chemical properties

Property Value Source

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Applications

Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon-rich silicon nitride
  • hydrogen silsesquioxane monomer
Product

HSQ-coated SiNx membrane

Method 2

Type: Physical formation
Source:
Starting materials
  • silicon-rich silicon nitride
  • hydrogen silsesquioxane monomer
Product

HSQ-coated SiNx membrane

Method 3

Type: Physical formation
Source:
Starting materials
  • silicon-rich silicon nitride
  • hydrogen silsesquioxane monomer
Product

HSQ-coated SiNx membrane

References

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