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BOX/Si/SiN/OPL/SiN/HSQ/BCP

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

buried oxide

BOX
Type Complex Compound
Formula
Role layer
2

silicon

Type Single Compound
Formula Si
Role layer
3

silicon-rich nitride

silicon mononitride silicon nitride
Type Single Compound
Formula SiN
Role layer
4

amorphous carbon

soot aC
Type Single Compound
Formula C
Role layer
5

silicon-rich nitride

silicon mononitride silicon nitride
Type Single Compound
Formula SiN
Role layer
6

SiOx/PS-b-PMMA

Type Nano Material
Formula
Role layer

Properties

Applications

Characterization

Biological effects

Preparation

References

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