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Al2O3 ALD film-based capacitor

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

aluminium oxide

aluminum oxide alumina
Type Single Compound
Formula Al2O3
Role raw materials
2

gold

Type Single Compound
Formula Au
Role partial layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
capacitance

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Applications

Area Application Nanomaterial Variant Source
energy storage

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon/silica
  1. HQi08ei
Product

Al2O3 ALD film-based capacitor

Plate diameter: 300000 nm

Thickness: 46.5 - 48.1 nm

Thickness: 60 nm

Medium: none

Support: silicon/silica

References

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