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silicon wafer covered with benzocyclobutene-based PS-r-PMMA copolymer

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon

Type Single Compound
Formula Si
Role layer
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
3

benzocyclobutene-based PS-r-PMMA copolymer

poly(S-r-BCB-r-PMMA)
Type Polymer
Formula
Role layer

Properties

Applications

Characterization

Biological effects

Preparation

References

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