Loading ...

Fast insight into nanotechnology

Access easily searchable nanoscience data, synthesis methods and literature

nanohole array-patterned Si3N4

Based on

5 Articles
2017 Most recent source

Composition

1

silicon nitride

Type Single Compound
Formula Si3N4
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
binding energy

More information/entries available to subscribers only.

Or, view sample content

Applications

Area Application Nanomaterial Variant Source
optoelectronics

More information available to subscribers only.

Or, view sample content

Characterization

Method Nanomaterial Variant Source
atomic force microscopy

More information/entries available to subscribers only.

Or, view sample content

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • Si3N4/Si
Product

nanohole array-patterned Si3N4

Hole depth: 300 nm

Hole diameter: ~ 265 nm

Hole periodicity: 530 nm

Maximum valley depth: 5.467 - 13.459 nm

Nonpatterned side RMS roughness: 0.401 - 0.466 nm

Nonpatterned side roughness: 0.3140 - 0.353 nm

Thickness: 800 nm

Medium: none

Support: soda-lime-silica glass

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • Si3N4/Si
Product

nanohole array-patterned Si3N4

Hole depth: 300 nm

Hole diameter: ~ 265 nm

Hole periodicity: 530 nm

Thickness: 450 nm

Medium: none

Support: soda-lime-silica glass

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • nitrogen
  1. O7lv51r
  2. fAExU
Product

nanohole array-patterned Si3N4

Thickness: ~ 2 nm

Medium: none

Support: silicon

References

Full content is available to subscribers only

To view content please choose from the following:

We use cookies to improve your experience with our site. More information

Sign up for a free trial