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germanium/HSQ prepattern/activated PS-b-P4VP film

Based on

1 Articles
2015 Most recent source

Composition

1

germanium

Type Single Compound
Formula Ge
Role layer
2

hydrogen silsesquioxane monomer

hydrogen silsesquioxane octasilsesquioxane XR-1541-002 XR-1541-4 XR-1541 Fox-16 FOx-16 HSQ
Type Single Compound
Formula H8O12Si8
Role layer
3

hydrogen silsesquioxane monomer

hydrogen silsesquioxane octasilsesquioxane XR-1541-002 XR-1541-4 XR-1541 Fox-16 FOx-16 HSQ
Type Single Compound
Formula H8O12Si8
Role partial layer
4

polystyrene

PS
Type Polymer
Formula
Role partial layer
5

poly(4-vinylpyridine)

P4VP
Type Polymer
Formula
Role layer

Properties

Applications

Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
  1. vyiKtOi
  2. CIN2
Product

germanium/HSQ prepattern/activated PS-b-P4VP film

Channel width: 224 nm

Cylinder size: 7.14 - 10.12 nm

Line width: 50 nm

Pitch: 30.35 - 34.55 nm

Thickness: ~ 60 nm

Medium: none

Support: SiO2/Si

Method 2

Type: Chemical synthesis
Source:
  1. DPbaTp3
  2. 8EDd
Product

germanium/HSQ prepattern/activated PS-b-P4VP film

Channel width: 265 nm

Cylinder size: 7.14 - 10.12 nm

Line width: 50 nm

Pitch: 30.35 - 34.55 nm

Thickness: ~ 60 nm

Medium: none

Support: SiO2/Si

Method 3

Type: Chemical synthesis
Source:
  1. jyLeySZ
  2. Sc0W
Product

germanium/HSQ prepattern/activated PS-b-P4VP film

Channel width: 361 nm

Cylinder size: 7.14 - 10.12 nm

Line width: 50 nm

Pitch: 30.35 - 34.55 nm

Thickness: ~ 60 nm

Medium: none

Support: SiO2/Si

Method 4

Type: Chemical synthesis
Source:
  1. QiRiry9
  2. 10ms
Product

germanium/HSQ prepattern/activated PS-b-P4VP film

Channel width: 326 nm

Cylinder size: 7.14 - 10.12 nm

Line width: 50 nm

Pitch: 30.35 - 34.55 nm

Thickness: ~ 60 nm

Medium: none

Support: SiO2/Si

Method 5

Type: Chemical synthesis
Source:
  1. qjl3cc3
  2. sMGu
Product

germanium/HSQ prepattern/activated PS-b-P4VP film

Cylinder size: 7.14 - 10.12 nm

Line width: 50 nm

Pitch: 30.35 - 34.55 nm

Thickness: ~ 60 nm

Medium: none

Support: SiO2/Si

References

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