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nanoporous silicon nitride-covered silicon wafer

Based on

1 Articles
2014 Most recent source

Composition

1

silicon-rich nitride

silicon mononitride silicon nitride
Type Single Compound
Formula SiN
Role layer
2

silicon

Type Single Compound
Formula Si
Role layer
3

nanoporous silicon nitride membrane

nanoporous silicon nitride
Type Nano Material
Formula
Role layer
4

porous nanocrystalline silicon

pnc-Si
Type Nano Material
Formula
Role layer
5

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer

Properties

Applications

Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
  1. Yy5GFzS8ABtm808
  2. OBXW9s1jcFHj5
  3. Dsucw3h64YVfb
  4. gV
  5. ODuJLHGJn
  6. TdNi
Product

nanoporous silicon nitride-covered silicon wafer

Thickness: 100 nm

Thickness: 50 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
  1. ssIeSRwIhkkCK6A
  2. 6loVmWfleR8it
  3. 4LyW6lIjTk5zJ
  4. Bo
  5. ByMc2YJd0
  6. 8OnL
Product

nanoporous silicon nitride-covered silicon wafer

Thickness: 100 nm

Thickness: 50 nm

Medium/Support: none

References

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