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nanoporous silicon nitride-covered silicon wafer

Based on

1 Articles
2014 Most recent source

Composition

1

silicon-rich nitride

silicon mononitride silicon nitride
Type Single Compound
Formula SiN
Role layer
2

silicon

Type Single Compound
Formula Si
Role layer
3

nanoporous silicon nitride membrane

nanoporous silicon nitride
Type Nano Material
Formula
Role layer
4

porous nanocrystalline silicon

pnc-Si
Type Nano Material
Formula
Role layer
5

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer

Properties

Applications

Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
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  2. I2lUWy4ehBpF5
  3. yegYHvT7SCUV0
  4. e0
  5. U5lAyM8Xm
  6. ha15
Product

nanoporous silicon nitride-covered silicon wafer

Thickness: 100 nm

Thickness: 50 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
  1. pQCldXHV7yNflRs
  2. g2Ohaei7xXuFH
  3. EowizpB5KgbIL
  4. 1V
  5. YCo14Gw8t
  6. 0zJt
Product

nanoporous silicon nitride-covered silicon wafer

Thickness: 100 nm

Thickness: 50 nm

Medium/Support: none

References

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