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nanoporous silicon nitride-covered silicon wafer

Based on

1 Articles
2014 Most recent source

Composition

1

silicon-rich nitride

silicon mononitride silicon nitride
Type Single Compound
Formula SiN
Role layer
2

silicon

Type Single Compound
Formula Si
Role layer
3

nanoporous silicon nitride membrane

nanoporous silicon nitride
Type Nano Material
Formula
Role layer
4

porous nanocrystalline silicon

pnc-Si
Type Nano Material
Formula
Role layer
5

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer

Properties

Applications

Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
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  3. VRxoFz09vUcIR
  4. Ki
  5. cV9vokoC6
  6. tGJW
Product

nanoporous silicon nitride-covered silicon wafer

Method 2

Type: Chemical synthesis
Source:
  1. zTsdAjDRv9liqqC
  2. lRPeEOo5AGGJn
  3. OLxfRKU5V22ob
  4. Ey
  5. uO7G6PFmr
  6. SuXn
Product

nanoporous silicon nitride-covered silicon wafer

References

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