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Ta-Ti-Al nitride thin film/Ti adhesion layer/Si substrate

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

titanium

Type Single Compound
Formula Ti
Role layer
2

tantalum titanium aluminum nitride

Ta0.29Ti0.37Al0.34 nitride
Type Complex Compound
Formula
Role layer
3

aluminum tantalum oxide

Type Complex Compound
Formula
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
current image

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Applications

Area Application Nanomaterial Variant Source
fuel cells

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Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
  1. hdEBYo
Product

Ta-Ti-Al nitride thin film/Ti adhesion layer/Si substrate

Thickness: 12 nm

Thickness: ~ 2 nm

Thickness: ~ 50 nm

Medium: none

Support: Si substrate

Method 2

Type: Chemical synthesis
Source:
  1. E64LiT
Product

Ta-Ti-Al nitride thin film/Ti adhesion layer/Si substrate

Thickness: 12 nm

Thickness: ~ 2 - 3 nm

Thickness: ~ 50 nm

Medium: none

Support: Si substrate

Method 3

Type: Chemical synthesis
Source:
  1. eW68Q4
Product

Ta-Ti-Al nitride thin film/Ti adhesion layer/Si substrate

Thickness: 12 nm

Thickness: ~ 2 - 3 nm

Thickness: ~ 50 nm

Medium: none

Support: Si substrate

Method 4

Type: Chemical synthesis
Source:
  1. EE0I2T
Product

Ta-Ti-Al nitride thin film/Ti adhesion layer/Si substrate

Thickness: 12 nm

Thickness: ~ 2 - 3 nm

Thickness: ~ 50 nm

Medium: none

Support: Si substrate

Method 5

Type: Chemical synthesis
Source:
  1. iSoa2X
Product

Ta-Ti-Al nitride thin film/Ti adhesion layer/Si substrate

Thickness: 12 nm

Thickness: ~ 2 - 3 nm

Thickness: ~ 50 nm

Medium: none

Support: Si substrate

References

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