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Ta-Ti-Al nitride thin film/Ti adhesion layer/Si substrate

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

titanium

Type Single Compound
Formula Ti
Role layer
2

tantalum titanium aluminum nitride

Ta0.29Ti0.37Al0.34 nitride
Type Complex Compound
Formula
Role layer
3

aluminum tantalum oxide

Type Complex Compound
Formula
Role layer

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
  1. 6uOk1i
Product

Ta-Ti-Al nitride thin film/Ti adhesion layer/Si substrate

Method 2

Type: Chemical synthesis
Source:
  1. Lo9EkY
Product

Ta-Ti-Al nitride thin film/Ti adhesion layer/Si substrate

Method 3

Type: Chemical synthesis
Source:
  1. nmwbkG
Product

Ta-Ti-Al nitride thin film/Ti adhesion layer/Si substrate

Method 4

Type: Chemical synthesis
Source:
  1. DeJo4f
Product

Ta-Ti-Al nitride thin film/Ti adhesion layer/Si substrate

Method 5

Type: Chemical synthesis
Source:
  1. EADFkj
Product

Ta-Ti-Al nitride thin film/Ti adhesion layer/Si substrate

References

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