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HfO2/SiO2 film

Based on

2 Articles
2017 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
2

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role layer

Properties

Applications

Characterization

Method Nanomaterial Variant Source
UV

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon dioxide
Product

HfO2/SiO2 film

Thickness: 50 nm

Thickness: 68 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • ethyl(methyl)[tris[ethyl(methyl)amino]hafnio]amine
  • SiO2/Si
  1. JMXh3f
Product

HfO2/SiO2 film

Thickness: 100 nm

Medium: none

Support: silicon

References

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