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nanoporous ultrathin silicon nitride membrane

Based on

5 Articles
1 Patents
2014 Most recent source

Composition

1

silicon nitride

Type Single Compound
Formula Si3N4
Role raw materials

Properties

General physical and chemical properties

Property Value Source

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Sensor properties

Type of sensor Sensor property Source

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Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon nitride
Product

nanoporous ultrathin silicon nitride membrane

Method 2

Type: Physical formation
Source:
Starting materials
  • silicon nitride
Product

nanoporous ultrathin silicon nitride membrane

Method 3

Type: Physical formation
Source:
Starting materials
  • silicon nitride
  • silicon wafer
Product

nanoporous ultrathin silicon nitride membrane

Method 4

Type: Physical formation
Source:
Starting materials
  • silicon nitride
  • silicon wafer
Product

nanoporous ultrathin silicon nitride membrane

Method 5

Type: Physical formation
Source:
Starting materials
  • silicon nitride
Product

nanoporous ultrathin silicon nitride membrane

References

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