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nanoporous ultrathin silicon nitride membrane

Based on

8 Articles
3 Patents
2017 Most recent source

Composition

1

silicon nitride

Type Single Compound
Formula Si3N4
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
cumulative ionic current dependent on voltage

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Sensor properties

Type of sensor Sensor property Nanomaterial Variant Source
compounds sensor for 153 nucleotide-long ssDNA in analyte buffer

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Applications

Area Application Nanomaterial Variant Source
analysis methods

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Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon nitride
Product

nanoporous ultrathin silicon nitride membrane

Pore size: ~ 150 - ~ 200 nm

Thickness: ~ 50 nm

Medium/Support: none

Method 2

Type: Physical formation
Source:
Starting materials
  • silicon nitride
  • silicon wafer
Product

nanoporous ultrathin silicon nitride membrane

Pore diameter: ~ 2 nm

Thickness: ~ 20 nm

Medium: none

Support: silicon wafer

Method 3

Type: Physical formation
Source:
Starting materials
  • silicon nitride
  • silicon wafer
Product

nanoporous ultrathin silicon nitride membrane

Pore diameter: ~ 2.7 nm

Thickness: ~ 2 nm

Medium: none

Support: silicon wafer

Method 4

Type: Physical formation
Source:
Starting materials
  • silicon nitride
  • silicon wafer
Product

nanoporous ultrathin silicon nitride membrane

Pore diameter: ~ 3 nm

Pore spacing: ~ 4000 nm

Thickness: ~ 20 nm

Medium: none

Support: silicon wafer

Method 5

Type: Physical formation
Source:
Starting materials
  • silicon nitride
  • silicon wafer
Product

nanoporous ultrathin silicon nitride membrane

Pore diameter: 1.5 - 10 nm

Thickness: ~ 20 nm

Medium: none

Support: silicon wafer

References

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