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line-space nanostructures

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

exposed HSQ photoresist

Type Complex Compound
Formula
Role raw materials

Properties

Applications

Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  1. ZVwXgHrPaPUCYBE1dabuKgCyohbr90FrXZs7sp7OX6Fd
Product

line-space nanostructures

Half-pitch: 25 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  1. 2A4FGnYbZKlOzvksLuIyngsM95jzlRY220YhWMsJbhiJ
Product

line-space nanostructures

Half-pitch: 23 nm

Medium/Support: none

Method 3

Type: Chemical synthesis
Source:
Starting materials
  1. CkNGeCcb8X9tlxMa1OgZsWan3IbXYzlWMVwC1tMlfyX0
Product

line-space nanostructures

Half-pitch: 8 nm

Line gratings height: ~ 20 nm

Medium/Support: none

Method 4

Type: Chemical synthesis
Source:
Starting materials
  1. 6lPJngHWqU6fkqZRWM346VN4RIetBKIv4b78QVNKwCNA
Product

line-space nanostructures

Half-pitch: 29 nm

Medium/Support: none

Method 5

Type: Chemical synthesis
Source:
Starting materials
  1. EHGtTECEAZaaf1VqmFS7Q7y3Ny9DYkn9JUY7Sb7tjyYc
Product

line-space nanostructures

Half-pitch: 9 nm

Line gratings height: ~ 20 nm

Medium/Support: none

References

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