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line-space nanostructures

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon nitride

Type Single Compound
Formula Si3N4
Role layer
2

chromium

Type Single Compound
Formula Cr
Role partial layer
3

HfO-based photoresist

Inpria XE15IB Inpria resist Inpria IB Inpria IB
Type Complex Compound
Formula
Role layer

Properties

Applications

Characterization

Method Source
scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  1. Ope3q1MPry7zckbFBoplpivREmWPP
  2. PEBmkOBAZbTgDPXwcMM7
Product

line-space nanostructures

Method 2

Type: Chemical synthesis
Source:
Starting materials
  1. RCe8VoeqtPIMiLUQFzUGrOiQUg5d7
  2. Uk3E3DHVyEJUXmVLnDg0
Product

line-space nanostructures

Method 3

Type: Chemical synthesis
Source:
Starting materials
  1. ndu9Xe5qqF5UwzmHty46bHjsQ7tjH
  2. mBOaDN9M35P2yMpL375L
Product

line-space nanostructures

Method 4

Type: Chemical synthesis
Source:
Starting materials
  1. L2u0ISu2Cp69B4kFbBnfcEmKkLVuv
  2. QQHRN2CQMx93UVSHcXQ8
Product

line-space nanostructures

References

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