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PMMA/SiNx membrane

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role layer
2

methyl methacrylate resin

methyl methacrylate resin PMMA
Type Polymer
Formula
Role layer

Properties

Applications

Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon-rich silicon nitride
  1. zQqpaAS08i5ch5
Product

PMMA/SiNx membrane

References

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