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holey silicon/chromium film

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon

Type Single Compound
Formula Si
Role layer
2

chromium

Type Single Compound
Formula Cr
Role layer

Properties

Applications

Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon-on-insulator
  1. W1JzNXsLiHO7L
Product

holey silicon/chromium film

Hole depth: 205 - 209 nm

Hole diameter: 38 - 42 nm

Neck size: 18 - 22 nm

Pitch holes: 60 nm

Thickness: 200 nm

Thickness: 5 - 9 nm

Medium: none

Support: silicon-on-insulator

References

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