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tantalum/titanium film on silicon/silica substrate

Based on

1 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

titanium

Type Single Compound
Formula Ti
Role layer
2

tantalum

Type Single Compound
Formula Ta
Role layer

Properties

Applications

Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
Product

tantalum/titanium film on silicon/silica substrate

Thickness: 10 nm

Thickness: ~ 200 nm

Medium: none

Support: silicon/silica

References

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